FRT MicroSpy 薄膜厚度量測工具

From: http://www.frtofamerica.com/us/products/microspy/microspy-ft

Optical single-sensor tool for 2D and 3D measurements of transparent and semitransparent
films. 

MicroSpy FT, 是用於透明或半透明的二維及三維的薄膜厚度量測的單感測器量測工具.

Application Versatility

多樣及彈性的應用

• For coatings that are transparent or  semi-transparent in the visible or near-infrared spectrum of light.

用於在可見光及近紅外光譜的光線下的透明或半透明的鍍膜.

• For self-supported films (e.g. foils), single coatings or stacked films on a substrate.

用於本身有支撐力的薄膜(如箔片), 單層鍍膜及在基材上的薄膜堆疊.

• For films as thin as 10 nanometers.

用於如1-耐米薄的薄膜.

• 2D point and profile measurements, 3D mapping mode. 

二維的點及剖面量測, 三維的應像模式.

• Sensors with different light sources, spot sizes
  and thickness measurement ranges available.

有各種不同光點大小的光源及厚度量測範圍的感測器.

• Basic automation functionalities.

基本的自動化功能.

Fast and Intuitive Operation

快速直覺的操作

• Integrated CCD-camera with illumination

• Live camera picture of measuring area in software

• Selection of measuring area with mouse

• Easy to use evaluation software

• Various functions for visualization, analysis and reporting.

整合有照明裝置的CCD相機.
在軟體內有生動的量測的相機圖片.
以滑鼠選擇量測的區塊.
方便的試用軟體.
各種用於檢視,分析及報表的功能.

Powerful Hardware

功能強大的硬體

• Fast, non-contact optical sensor

• Motorized x,y-measuring area of 50 mm x 50 mm

• Manual sensor approach through precise z-axis

• Depending on selected sensor, non-destructive
  film measurements of a few mm down to 10 nm

快速, 非接觸式的光學感應器.
電動50 mm x 50 mm 的 X,Y 量測區域.
精準Z 軸手動感應器對位.
依所選用的不同的感應器,  由幾個mm低到10奈米的非破壞式薄膜量測.

Cost-effective Investment

有效成本的投資

The FRT MicroSpy® FT is designed to be
cost-effective and powerful at the same time

 FRT MicroSpy® FT是同時為有效成本及兼據功能強大而設計.

• Attractive purchase price

• Low follow-up costs for training, service and spare parts 

• Small footprint

吸引人的購買價格.
低的後續訓練, 服務及零件備品成本 .
體積小.

詳細訊息

光學反射式量測的原理是基於從薄膜邊界反射的光束的重疊.

對照於干射式的量測, 所量到的反射光譜, 與計算出的一個來比較, 其間這未知的厚度有系統地變動, 直到兩個光譜圖相合. 這允許可以測定幾奈米非常薄的薄膜的厚度.

干射式量測的原理

白光光源來(白光LED, 近紅外LED)的光被聚焦到薄膜上, 入射光在透明薄膜邊界被部份反射.  選定光波的光譜圖被估算以決定薄膜厚度.

由於在薄層邊界被反射的光線的干射, 光譜圖顯示出點型的波紋, 應器據以薄膜厚度. 由於光譜圖的估算, 不只是與厚度有關, 而是與材料的折射率指數有有關, 這項參數(折射率)也被包含在厚度值的計算裏面.

 FRT MicroSpy® FT 量測系統的規格