探針式表面量測儀

Development Series Stylus Profilers

From: http://www.kla-tencor.com/surface-profiling/alpha-step-d-100.html

Alpha-Step D-100

AlphaStep® D-100 Stylus Profiler


	Easy to use full featured user interface

The KLA-Tencor Development Series of Stylus profilers offer a complete solution focusing on the needs of the engineering and research community. Our Development Series of surface profiler products is designed to match the varied requirements of our customers through the delivery of full featured products, integration of new technologies, and improved performance.

聚焦於工程及研究社群, KLA-Tencor的研發系列, 探針式表面量測儀 , 提供了一個完整的解決方案. 我們的經由功能齊全的產品的遞送, 新科技的整合, 以及增進的性能, Development 系列的表面量測儀產品, 是設計於配合客戶各種不同的需求.

30 mm scan length
Z sensor range up to 1.2 mm
140mm manual sample positioning stage
Force control 0.03mg – 10mg
Windows XP, Vista, and Windows 7 compatible

30 mm 的掃描長度, z(高度)方向的範圍達到1.2mm, 140mm 的樣品定位平台, 探針力量控制 0.03mg-10mg.

The AlphaStep® D-100 profilometer rapidly and quantitatively measures the 2D topography of surfaces. The AlphaStep® D-100 systems includes an 800 micron (optional 1.2 millimeter) Z range, sub-angstrom resolution, 6 angstrom step height repeatability, manual x-y theta sample positioning stage, and many other features.

AlphaStep® D-100 表面量測儀快速且量化地量測二維的表面型態. AlphaStep® D-100 系統包括一個800微米(1.2mm選購)的Z(高度)方向的範圍, 次"埃"等級的解析度, 6"埃"的步進高度的重復性, 手動的x-y(水平) 角度的樣品定位平台, 以及很多其他功能.

The graphical user interface has a multi-document interface that allows a user to continually acquire and display scan data. This permits the user to analyze the data while acquiring additional measurements. The profiler software controls support scans to be automatically leveled, scan features measured, and displayed in an Excel compatible format on the screen. All of the windows are independent which mean the control panels and data display windows, real-time scanning window, the data results window can float or be docked anywhere on the screen. This feature gives the user a fully flexible environment in which to acquire and analyze data.

圖形化使用介面有有多文檔界面的(MDI), 可以讓使用者在持續進行數據擇取及顯示所得的數據資料. 如此, 允許使用者在進行數據擇時也能分析以取得的數據資料. 表面量測儀軟體支援可自動升降的掃描, 所要量測的掃描特徵, 並且以EXCEL 相容的格式顯示在螢幕上. 所有視窗是獨立的, 這表示控制板及數據資料視窗, 即時掃描視窗, 數據結果視窗, 可以在螢幕上任意為置浮動或固定. 這個特點, 給使用者一個在其中進行數據擇取與數據分析的完全彈性的環境.

Applications:
Surface Texture Precision step height Surface form Thin film stress Biological MEMS Material Characterization

應用:

表面文理, 精確的梯度高度, 表面型狀, 較薄薄膜的應力, 生物學, 微機電元件, 材料特性等.

RELATED INFORMATION (下載)

Alpha-Step D-100 Product Overview