FRT 微耐米三維表面量測設備

FRT MicroSpy 薄膜厚度量測工具

FRT 產品簡介小冊子(英文PDF檔)  ,   內容包括: 

MicroProf (多用途機型)

MicroProf--Vision(製造環境的重負荷機型)

MicroProf--TTV(可同時進行兩面量測, 總厚度變異)

MicroProf--Mobile(可攜性所帶來的使用彈性)

MicroProf--Twist(適用於所有的氣缸型狀的樣品量測)

MicroProf Cylinder Measuring Station(專用於汽缸, 透鏡, 晶圓等的樣品量測)

Company Overview(公司及產品概況)

From: http://www.frtofamerica.com/us

FRT of America operates from San Jose, CA and Somers, CT and is a wholly owned subsidiary of FRT GmbH Germany which maintains further subsidiaries in Switzerland, China and Taiwan. Additionally, FRT provides a distribution and service network in Asia and Europe.

美國FRT提供了一個完整範圍的度量學的表面量測系統,  用於非破壞式的形貌, 剖面, 膜厚, 粗糙度, 總厚度差異及許多其他性質的的檢測. 超過 400家以上的知名國際公司, 從汽車工業, 半導體, 微機電, 光學, 光伏, 以及許多其他的工業, 都有在他們的 研就發展及製造工廠使用FRT的量測設備.

來自San Jose, CA and Somers, CT 的美國FRT, 是一家由 德國 FRT 股份有限公司完全持有 的一分公司. 而它(德國公司)更進一步地持有瑞士, 中國及台灣等分支機構.  此外, FRT 也在亞洲及歐洲提供了經銷及服務網. 

FRT Customer Magazine(FRT 客戶雜誌)

FRT frequently publishes the customer magazine HEADLINE which presents new metrology tools and solutions. In this issue, beside other interesting topics, the new 3D measuring microscope MicroSpy Topo DT is presented. The tool features a confocal and interferometric measuring mode for increased versatility.
View Headline as PDF (1.9 MB)

FRT 經常出版客戶雜誌HEADLINE, 它代表新的技術及姐決方案. 在這個出版品裏, 除了其他有趣的主題, 提出了新的三維量測顯微鏡 MicroSpy Topo DT.  這個工具特點在於用來增加不同用途的共軛及干射的量測模式.

Metrology for Frontend(尖端應應用的度量學工具)
(view product movie)

The measuring systems series MFE (metrology front end) is particularly suited to manufacturers of structured wafers, masks, MEMS and similar products. Because of the very high cleanliness, process and yield requirements, all tools are especially designed for use in cleanrooms. 

MFE(metrology front end)量測系統系列 , 特別適合於結構話晶圓, 光罩, 微機電及類似的產品的製造者. 由於需要很高的潔淨度, 製程及產律的要求, 這個工具是特別設計用於潔淨室.

MFE systems measure critical dimensions and overlays on the one hand and 3D topography or film thickness on the other. 
All tools are metrological and comply with the necessary industry standards such as the SECS II / GEM software interface. 
Furthermore, the system is fully automated and equipped 
with wafer cassettes and part carriers.
An EFEM and mini-environment for class 1 cleanrooms 
rounds off the upper segment of the MFE tool series.

MFE(metrology front end)量測系統, 一方面可量測重要的尺吋及重疊, 另方面也可量測三維型貌或膜厚.

全部的工具都是度量學的,且符合所需的工業標準, 例如  SECS II / GEM 軟體介面.

更好的, 此量測系統是完全自動化的, 並且備有晶圓卡匣及零件裝載器.

• fully enclosed(完全密閉)
• class 1 clean room certified(1級潔淨室認證)
• cassette to cassette handling(卡匣更換的操作)
• prealignment(前置對齊)
• OCR(光學字元識別)
• systems for 200 mm, 300 mm etc. available(取得用於200 mm, 300 mm 的系統)

Budget-friendly optical film thickness measurement tool(預算友善的膜厚量測工具).

The new MicroSpy FT non-destructively measures coatings that transparent or semi-transparent in the visible and near-infrared spectrum of light. The easy to use film thickness measuring tool is cost-effective and powerful at the same time. With its innovative 3D film thickness mapping mode, the tool allows the thickness measurement of entire coating. 

這新的MicroSpy FT,以可見光及近紅外光譜的光線, 非破壞式地量測透明或半透明的鍍膜,  簡單的膜厚量測工具節省成本, 同時功能強大. 以其創新的三維厚度硬射模式, 此工具允許整個鍍膜的厚度量測.

The MicroSpy® FT is a budget friendly single-sensor measuring tool for 2D and 3D thickness measurements of films that are transparent or semi-transparent.

The tool is used in R&D as well as industrial production control. Main areas of application are the measurement of coating thickness and complex film stacks which are typical for products found in the medical, optical, photovoltaic, semiconductor and MST industry.

MicroSpy FT, 是用於二維及三維的透明或半透明的薄膜厚度量測的一個預算友善的單感測器量測工具.

此量測工具用於研究開發, 也用於工業產品控制. 主要應用領域為鍍膜厚度及複雜薄膜堆疊, 這些是在醫藥, 光學, 光伏, 半導體及微系統科技等產品裏, 可以找到的典型的組成.

Metrology for the Medical Device Industry(用於醫藥設備的度量學工具)
The new industry leaflet for the medical device industry introduces the various solutions FRT has to offer for developers and manufacturerse of medical products such as stents, needles, catheters, lab-on-a-chip, implants, blood sensors, and much more. 
(PDF, 3.7 MB)

醫藥設備工業的新的發展, 開啟了FRT 必須供應給諸如固定膜, 針頭, 導管, 晶片實驗室, 植入片, 血液感測器, 以及很多其他的醫藥產品的開發者及製造者, 各種解決方案. 

Metrology for the MEMS industry(用於微機電系統的度量學工具)
MEMS components have revolutionized today's products by making them safer and adding exciting new features. MEMS mass production is based on semiconductor production equipment – including non-contact, high-resolution metrology tools for 2D and 3D wafer inspection from FRT. (PDF, 3.7 MB)

微機電系統的零組件, 經由製作出更安全, 且加進令人振奮的新功能, 已經革新了今日的產品.   微機電系統的大量製造是基於半導體製造設備--包括來在FRT, 用於二維及三維晶圓檢查的非接觸式, 高解析度度量學工具.

Metrology for the automotive industry(用於汽車工業的的度量學工具)

The automotive industry is in new territory with the need to make precise measurements. Product features are determined by deliberate structures, surfaces and small component geometries that must be controlled. This information need can be obtained by non-contact optical metrology.
(PDF, 2.3 MB)

汽車工業是一個需要進行精密量測的新的領域. 產品的特性由必須被控制好的審慎的結構, 表面以及小零件的幾何來決定. 這項資訊需求, 可以由非接處觸式光學度量學工具量測的到.

Metrology for the photovoltaic industry(用於光伏工業的度量學工具)
the photovoltaic and solar industry are constantly seeking for improvements in effeciency and effectitivity for R&D, quality assurance and automated production control. This new leaflet about about metrology in photovoltaics presents typical applications and matching FRT instruments. (PDF, 1.7 MB)

光伏工業及太陽能工業的永恆地愛尋求效能及研發效率的增進, 品質保證及自動製造控制. 有關光伏工業的度量學量測的新的發展, 呈現了合於FRT儀器的典型應用.

Metrology for the semiconductor industry (用於半導體工業的度量學工具)

Download our new leaflet about wafer metrology. Learn about our standard systems and their appropriate applications in the semiconductor process. This leaflet is intended for wafer makers, semiconductor manufacturers and wafer reclaimers.
(PDF, 2.3 MB)

下載我們有關晶圓度量學的新的發展. 知到關於我們的標準系統及他們在半導體製程裏的適當的應用. 這項新的發展是要用於晶圓生產者, 半導體製造者,以及晶圓的回收再生.

August 2011
A successful first year for the SEAL European semiconductor project more...

March 2010
FRT Introduces Ultra High Aspect-Ratio Measurements more...

usnanotech 2011, October 2011
The Russian Corporation of Nanotechnologies invites you to take part in the Exhibition, which is to be held within the frame of the Nanotechnology more...

FRT offers a broad range of measuring systems. You  can choose between standardized system and custom systems to fit your individual need.
more ...

FRT  提供一個寬廣範圍的量測系統.  您可在標準系統及客製化系統之間作選擇以適合您個別的需要.

FRT develops systems for process control which are specially designed to perform best within a given production process.
more ...

FRT 開發為特定製造程序的最佳性能而設計的系統.

FRT offers contract services for metrology measurements.
more ...

FRT 提供度量學量測的契約服務.